AccuThermo AW 820V Vacuum Rapid Thermal Processing Equipment (Top&Bottom Lamp Heating)
sales@allwin21.com
The AccuThermo AW820V is a stand alone Vacuum RTP (Rapid Thermal Processing) system, which uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1 900 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.
Key Features:
Vacuum capability RTP/RTA/RTO/RTN system with Top and bottom High-intensity visible radiation Tungsten halogen lamp heating for fast heating rates with good repeatability performance and long lamp lifetime.
Scattered IR light by special gold plated Al chamber surface.
Allwin21 advanced Software package with real time control technologies and many useful functions.
Consistent wafer-to-wafer process cycle repeatability.
Cooling N2 (Or CDA) flows around the lamps and quartz isolation tube for fast cooling rates
Up to five gas lines with 4 MFCs and shut-off valves
Energy efficient.
Made in U.S.A.
Small footprint
Specifications:
Wafer sizes: Small pieces, 2", 3", 4", 5", 6", 8" wafer capability
Vacuum Pressure: 50mTorr to 13 Torr or 13 Torr to 760 Torr
Recommended ramp up rate: Programmable, 10°C to 120°C per second. Maximum Rate: 200°C (NOT RECOMMENDED)
Recommended steady state duration: 0-600 seconds per step.
Ramp down rate: Non-programmable, 10°C to 200°C per second.
Recommended steady state temperature range: 150°C - 1150°C. Maxim 1250°C (NOT RECOMMENDED)
Special quick response K-Type TC temperature accuracy: ±1°C, when calibrated against an instrumented thermocouple wafer.
Thermocouple temperature accuracy: ±0.5°C with rapid response.
Temperature repeatability: ±0.5°C or better at 1150°C wafer-to-wafer. (Repetition specifications are based on a 100-wafer set.)
Temperature uniformity: ±8°C across a 8" (200 mm) wafer at 1150°C. (This is a one sigma deviation 100 angstrom oxide.) For a titanium silicide process, no more than 6% increase in non-uniformity during the first anneal at 650°C to 700°C.
Process/Purge gas inputs: Any inert and/or non-toxic gas regulated to 30 PSIG and pre-filtered to 1 micron. Typically, N2, O2), Ar, He, forming gas, NH3, N2O2 are used.
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Interview Q&A
How long have you been in business?
15 years
What is your primary product or service?
Allwin21 Corp. was formed in 2000 with a focus on professionally providing Rapid Thermal Process, Plasma Asher Strip / Descum, Plasma Etch/RIE, Sputter Deposition and Metal Film Metrology high-tech semiconductor equipment, services and technical support in Semiconductor III-V, MEMS, Biomedical, Nanotechnology, Solar, Battery & LED industries. We endeavor to be a leader in our product lines.
We focus on extending product lifecycle, providing solutions, and engineering enhancements to many production proven semiconductor process equipment most directly related to III-V processing. These semiconductor equipment have been used in production and R&D since the 1990′s. They have proven processes and research. Allwin21 Corp. customizes these systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system, and new critical components. This is to achieve the goal of giving our customers a production edge, with right cost, and without having to worry about obsolete parts.
Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Process tool. We are manufacturing the new AccuThermo AW Series Rapid Thermal Processors. Compared with traditional RTP systems, Allwin21’s AccuThermo AW RTPs have innovative software and more advanced real time temperature control technologies to achieve the BEST rapid thermal processing performance (repeatability, uniformity, and stability) with decades of research directly applicable to ours.
We have maintained a global presence that has grown and expanded into the major high-tech manufacturing areas of the world. We pride ourselves on developing and continuing lasting customer relationships.
We understand that a timely responsive support and service are critical elements in semiconductor industries. Allwin21’s experienced engineer team is the best guarantee for high quality service and support. We provide on-site installation, training, maintenance, system optimization, retrofits, and/or customized upgrades
What sets us apart from the competition…
1) Exclusive licensed manufacturer of Heatpulse 610 of AG Associates.
2) Advanced Allwin21 Real Time PC Control Technology.
3) Focus on Production-Proven process technology.
4) Integrated 3-axis solid robotic wafer transfer technology.
5) Experienced local engineer support.
6) Products made in U.S.A
Main Products:
Rapid Thermal Process
AccuThermo AW410
AccuThermo AW610
AccuThermo AW810
AccuThermo AW820
AccuThermo AW610V
AccuThermo AW820V
Sputter Deposition
AccuSputter AW4450
Perkin Elmer 4400
Perkin Elmer 4410
Perkin Elmer 4450
Plasma Ash/Descum
AW-105R
AW-1008
AW-B3000
Plasma Etch/RIE
AW-2001R
AW-901eR
AW-903eR
TTW AW-901eR
TTW AW-903eR
Metal Film Metrology
AWgage-150
AWgage-200
Upgrade Kits for :
AG Associates Heatpulse 210, Minipulse 310, Heatpulse 410, Heatpulse 610 Rapid Thermal Processing equipment; Tegal 901e, Tegal 903e, Gasonics AE 2001, Matrix 303, Matrix 403, Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Lam AutoEtch 480, Lam AutoEtch 580, Lam AutoEtch 680, Lam AutoEtch 780 Plasma Etcher equipment;Matrix 105, Matrix 106,Matrix 205, Matrix 101,Matrix 102,Matrix 103, Matrix 104, Matrix 10, Gasonics Aura 1000, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510, Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000 Plasma Asher ,Plasma Descum Equipment; Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Perkin-Elmer 2400 sputter deposition systems
How did you first become interested in your line of business? (if owner) - What is your background? (If owner or store manager)
We have been the process engineer and equipment engineer for more than 20 years.
How do you differentiate yourself from other businesses in your category and area?
1) Exclusive licensed manufacturer of Heatpulse 610 of AG Associates.
2) Advanced Allwin21 Real Time PC Control Technology.
3) Focus on Production-Proven process technology.
4) Integrated 3-axis solid robotic wafer transfer technology.
5) Experienced local engineer support.
How many locations do you have and do you have plans to expand?
All over the world.
Provide detailed directions to your location
220 Cochrane Circle, Morgan Hill,CA95037
What type of payments do you accept?
Cash,Check,remit
What are your hours of operation?
9am-5pm
Contact AccuThermo AW 820V Vacuum Rapid Thermal Processing Equipment (Top&Bottom Lamp Heating):
