Kesa Corporation manufactures and sells the ECS-3000 control system for Varian Sputter Coaters. ECS-3000 can be installed or retrofitted on Varian Models 3180, 3190, and 3290 Thin Film Coaters. ECS-3000 is a state of the art GUI based control system, and includes as an option complete SECS/GEM communications. ECS-3000 is Y2K compliant.
Keywords: ECS,ECS-3000,3190,3290,3290STQ,3290mQ,3290ST,Varian,Varian Wafer Coater, Varian 3290,Kesa,semiconductor,semiconductor equipment,wafer coater,thin film,retrofit,semiconductor capital equipment,refurbish,thin film coater,sputter coater,sputtering systems,control system,equipment control system, semiconductor equipment,in-line sputter coater
